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[IEEE 23rd International Conference on Microelectronics (MIEL 2002) - Nis, Yugoslavia (12-15 May 2002)] 2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595) - Structural-phase ordering in Ta/sub 2/O/sub 5/-p-Si heterosystem enhanced by microwave processing
Atanassova, E., Boltovets, N.S., Kolyadina, E.Yu., Konakova, R.V., Koprinarova, J., Matveeva, L.A., Milenin, V.V., Mitin, V.F., Shynkarenko, V.V., Voitsikhovskyi, D.I.Volume:
2
Year:
2002
Language:
english
DOI:
10.1109/miel.2002.1003313
File:
PDF, 216 KB
english, 2002