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[IEEE 2011 22nd Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2011.05.16-2011.05.18)] 2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference - 45nm Yield model optimization
Walsh, Brian L., Colt, John, Poindexter, Daniel, Joseph, ThomasYear:
2011
Language:
english
DOI:
10.1109/asmc.2011.5898162
File:
PDF, 249 KB
english, 2011