Combination of characterization techniques for atomic layer deposition MoO3 coatings: From the amorphous to the orthorhombic α-MoO3 crystalline phase
Diskus, Madeleine, Nilsen, Ola, Fjellvåg, Helmer, Diplas, Spyros, Beato, Pablo, Harvey, Clare, van Schrojenstein Lantman, Evelien, Weckhuysen, Bert M.Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3643350
File:
PDF, 2.32 MB
english, 2012