Simulation of sheath dynamics and current nonuniformity in...

Simulation of sheath dynamics and current nonuniformity in plasma-immersion ion implantation of a patterned surface

Briehl, Boris, Urbassek, Herbert M.
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Volume:
93
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1555682
File:
PDF, 2.03 MB
english, 2003
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