[RTP 9th International Conference on Advanced Thermal Processing of Semiconductors. RTP 2001 - Anchorage, AK, USA (25-29 Sept. 2001)] 9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001 - Reduced time high temperature processing for thyristor silicon wafers
Obreja, V.V.N., Podaru, C.Year:
2001
Language:
english
DOI:
10.1109/rtp.2001.1013776
File:
PDF, 323 KB
english, 2001