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Analytical behavior of rectangular electrostatic torsion actuators with nonlinear spring bending
Zhixiong Xiao,, Wuyong Peng,, Farmer, K.R.Volume:
12
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2003.820265
Date:
December, 2003
File:
PDF, 631 KB
english, 2003