A further exploration of an important factor affecting the...

A further exploration of an important factor affecting the pumping performance of turbomolecular pumps

Tu, J. Y.
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Volume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575542
Date:
July, 1988
File:
PDF, 628 KB
english, 1988
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