![](/img/cover-not-exists.png)
Effects of sputtering through small apertures on the refractive index of niobium pentoxide films
Hickernell, Fred S.Volume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575284
Date:
May, 1988
File:
PDF, 547 KB
english, 1988