Properties of ZnO:In film prepared by sputtering of facing ZnO:In and Zn targets
Tominaga, K.Volume:
16
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581261
Date:
May, 1998
File:
PDF, 372 KB
english, 1998