SiH[sub x] film growth precursors during high-rate...

SiH[sub x] film growth precursors during high-rate nanocrystalline silicon deposition

Kessels, W. M. M., Nadir, K., van de Sanden, M. C. M.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
99
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2188068
File:
PDF, 291 KB
english, 2006
Conversion to is in progress
Conversion to is failed