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One-Step Fabrication of Copper Thin Films on Insulators Using Supercritical Fluid Deposition
Uejima, T., Momose, T., Sugiyama, M., Kondoh, E., Shimogaki, Y.Volume:
160
Language:
english
Journal:
Journal of the Electrochemical Society
DOI:
10.1149/2.044312jes
Date:
December, 2013
File:
PDF, 1.42 MB
english, 2013