Analysis of deposition stress during thin-film growth on a...

Journal of Applied Physics 1995 Vol. 77; Iss. 12

Analysis of deposition stress during thin-film growth on a relaxing substrate

Rosenberg, Sara E., Wong, Peter Y., Miaoulis, Ioannis N.
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Volume:
77
Year:
1995
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.359094
File:
PDF, 950 KB
english, 1995
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