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Instabilities and multiple steady states of radio-frequency discharges in
Metsi, Efimia, Gogolides, Evangelos, Boudouvis, AndreasVolume:
54
Language:
english
Journal:
Physical Review E
DOI:
10.1103/PhysRevE.54.782
Date:
July, 1996
File:
PDF, 2.01 MB
english, 1996