Improved quality a-SiC:H films prepared by photo chemical...

Improved quality a-SiC:H films prepared by photo chemical vapour decomposition of silane and acetylene

Swati Ray, Sukriti Ghosh, Abhijit De, A.K. Barua
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Volume:
33
Year:
1994
Language:
english
Pages:
15
DOI:
10.1016/0927-0248(94)90011-6
File:
PDF, 758 KB
english, 1994
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