Improved quality a-SiC:H films prepared by photo chemical vapour decomposition of silane and acetylene
Swati Ray, Sukriti Ghosh, Abhijit De, A.K. BaruaVolume:
33
Year:
1994
Language:
english
Pages:
15
DOI:
10.1016/0927-0248(94)90011-6
File:
PDF, 758 KB
english, 1994