Growth of high quality microcrystalline silicon by layer-by-layer deposition technique
Kyu Chang Park, Sung Ki Kim, Min Park, Jung Mok Jun, Kyung Ha Lee, Jin JangVolume:
34
Year:
1994
Language:
english
Pages:
7
DOI:
10.1016/0927-0248(94)90079-5
File:
PDF, 283 KB
english, 1994