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Hydrogen in silicon: A discussion of diffusion and passivation mechanisms
B.L. Sopori, X. Deng, J.P. Benner, A. Rohatgi, P. Sana, S.K. Estreicher, Y.K. Park, M.A. RobersonVolume:
41-42
Year:
1996
Language:
english
Pages:
11
DOI:
10.1016/0927-0248(95)00098-4
File:
PDF, 798 KB
english, 1996