Spectroscopic analysis of Al and N diffusion in HfO2

Lysaght, P. S., Woicik, J. C., Sahiner, M. A., Price, J., Weiland, C., Kirsch, P. D.

How much do you like this book?

What’s the quality of the file?

Download the book for quality assessment

What’s the quality of the downloaded files?

Volume:

112

Year:

2012

Language:

english

Journal:

Journal of Applied Physics

DOI:

10.1063/1.4754578

File:

PDF, 1.91 MB

english, 2012

Conversion to is in progress

Conversion to is failed