![](/img/cover-not-exists.png)
[IEEE 2013 46th Hawaii International Conference on System Sciences (HICSS) - Wailea, HI, USA (2013.01.7-2013.01.10)] 2013 46th Hawaii International Conference on System Sciences - Data Mining and Support Vector Regression Machine Learning in Semiconductor Manufacturing to Improve Virtual Metrology
Lenz, Benjamin, Barak, BerndYear:
2013
Language:
english
DOI:
10.1109/hicss.2013.163
File:
PDF, 486 KB
english, 2013