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Templated Thermal Dewetting Process by Utilizing Nano Plastic Forming Technology
Ueno, Takayuki, Terano, Motoki, Yoshino, MasahikoVolume:
81
Year:
2014
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2014.10.175
File:
PDF, 2.27 MB
english, 2014