![](/img/cover-not-exists.png)
6H-SiC JFETs for 450 $^{\circ}\hbox{C}$ Differential Sensing Applications
Patil, A.C., Xiao-an Fu,, Anupongongarch, C., Mehregany, M., Garverick, S.L.Volume:
18
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2009.2021831
Date:
August, 2009
File:
PDF, 1.45 MB
english, 2009