![](/img/cover-not-exists.png)
[IEEE International Conference on Advanced Thermal Processing of Semiconductors - Charleston, NC, USA (23-26 Sept. 2003)] 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors. RTP 2003 - RTP of titanium boride for applications in front end processing
Zagozdzon-Wosik, W., Ranjit, R., Rusakova, I., van der Heide, P., Zhang, Z., Bennett, J.Year:
2003
Language:
english
DOI:
10.1109/rtp.2003.1249150
File:
PDF, 507 KB
english, 2003