Investigation of the kinetic mechanism for the ion-assisted...

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Investigation of the kinetic mechanism for the ion-assisted etching of GaAs in Cl2 using a modulated ion beam

S. C. Mcnevin, G. E. Becker
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Year:
1985
Language:
english
DOI:
10.1063/1.336241
File:
PDF, 1.00 MB
english, 1985
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