Infrared absorption study of rapid thermal oxidation and in situ steam generation of thin SiO[sub 2] films by gradient etching preparation
N. Nagai, K. Terada, Y. Muraji, H. Hashimoto, T. Maeda, Y. Maeda, E. Tahara, N. Tokai, A. HattaYear:
2002
Language:
english
DOI:
10.1063/1.1459097
File:
PDF, 359 KB
english, 2002