![](/img/cover-not-exists.png)
Molecular-dynamics model of energetic fluorocarbon-ion bombardment on SiO[sub 2]. II. CF[sub x][sup +] (x=1, 2, 3) ion etch characterization
V. V. Smirnov, A. V. Stengach, K. G. Gaynullin, V. A. Pavlovsky, S. Rauf, P. Stout, P. L. G. VentzekYear:
2005
Language:
english
DOI:
10.1063/1.1893206
File:
PDF, 882 KB
english, 2005