Integrated tunneling sensor for nanoelectromechanical systems
S. Sadewasser, G. Abadal, N. Barniol, S. Dohn, A. Boisen, L. Fonseca, J. EstéveYear:
2006
Language:
english
DOI:
10.1063/1.2362593
File:
PDF, 406 KB
english, 2006