Fluorine implantation for effective work function control...

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Fluorine implantation for effective work function control in p-type metal-oxide-semiconductor high-k metal gate stacks

A. Fet, V. Häublein, A. J. Bauer, H. Ryssel, L. Frey
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Year:
2011
Language:
english
DOI:
10.1116/1.3521471
File:
PDF, 857 KB
english, 2011
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