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P-192: Evaluation of Dimensional Stability during Low-Temperature Poly-Si TFT Fabrication Process Using an Ultra-Low Thermal-Shrinkage Glass Substrate
Hayashi, Kazutaka, Akiyama, Jun, Kunigita, MasayaVolume:
45
Language:
english
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/j.2168-0159.2014.tb00325.x
Date:
June, 2014
File:
PDF, 817 KB
english, 2014