High voltage microelectromechanical systems platform for fully integrated, on-chip, vacuum electronic devices
S. Natarajan, C. B. Parker, J. T. Glass, J. R. Piascik, K. H. Gilchrist, C. A. Bower, B. R. StonerYear:
2008
Language:
english
DOI:
10.1063/1.2938075
File:
PDF, 566 KB
english, 2008