Submicron, vacuum ultraviolet contact lithography with an F2 excimer laser
J. C. White, H. G. Craighead, R. E. Howard, L. D. Jackel, R. E. Behringer, R. W. Epworth, D. Henderson, J. E. SweeneyYear:
1984
Language:
english
DOI:
10.1063/1.94589
File:
PDF, 450 KB
english, 1984