Atomic Layer Deposition of High-Permittivity Yttrium-Doped...

Electrochemical and Solid-State Letters 2009 Vol. 12; Iss. 1

Atomic Layer Deposition of High-Permittivity Yttrium-Doped HfO[sub 2] Films

Niinistö, Jaakko, Kukli, Kaupo, Sajavaara, Timo, Ritala, Mikko, Leskelä, Markku, Oberbeck, Lars, Sundqvist, Jonas, Schröder, Uwe
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Volume:
12
Year:
2009
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3020763
File:
PDF, 127 KB
english, 2009
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