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[IEEE 2013 Symposium on Microelectronics Technology and Devices (SBMicro) - Curitiba, Brazil (2013.09.2-2013.09.6)] 28th Symposium on Microelectronics Technology and Devices (SBMicro 2013) - Physical Characterization of TiOx layers deposited from sol-gel technique
Meneses, C., Sanchez, J., Estrada, M., Pereyra, I., Avila-Garcia, A., Escobosa, A., Pavanello, M.Year:
2013
Language:
english
DOI:
10.1109/sbmicro.2013.6676158
File:
PDF, 470 KB
english, 2013