The role of silicon self-interstitial supersaturation in the retardation of oxygen precipitation in Czochralski silicon
W. B. Rogers, H. Z. Massoud, R. B. Fair, U. M. Gösele, T. Y. Tan, G. A. RozgonyiYear:
1989
Language:
english
DOI:
10.1063/1.343303
File:
PDF, 806 KB
english, 1989