Niobium nitride thin films deposited by high temperature...

Surface and Coatings Technology 2014 / 12 Vol. 260

Niobium nitride thin films deposited by high temperature chemical vapor deposition

Mercier, Frédéric, Coindeau, Stéphane, Lay, Sabine, Crisci, Alexandre, Benz, Matthieu, Encinas, Thierry, Boichot, Raphaël, Mantoux, Arnaud, Jimenez, Carmen, Weiss, François, Blanquet, Elisabeth
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Volume:
260
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2014.08.084
Date:
December, 2014
File:
PDF, 1.88 MB
english, 2014
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