Pyrolysis of polyvinylsilazane precursors to silicon...

Pyrolysis of polyvinylsilazane precursors to silicon carbonitride

A. Lavedrine, D. Bahloul, P. Goursat, N. Choong Kwet Yive, R. Corriu, D. Leclerq, H. Mutin, A. Vioux
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Volume:
8
Year:
1991
Language:
english
Pages:
7
DOI:
10.1016/0955-2219(91)90098-k
File:
PDF, 706 KB
english, 1991
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