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An in-situ study of the oxidation of AlN layers fabricated by LPCVD using X-ray diffraction
C. Labatut, D. Kharchi, B. Aspar, F. Sibieude, B. ArmasVolume:
13
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0955-2219(94)90009-4
File:
PDF, 839 KB
english, 1994