Calculation of the electrode shape for suppression of the...

  • Main
  • Calculation of the electrode shape for...

Calculation of the electrode shape for suppression of the standing wave effect in large area rectangular capacitively coupled reactors

L. Sansonnens
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2005
Language:
english
DOI:
10.1063/1.1862770
File:
PDF, 660 KB
english, 2005
Conversion to is in progress
Conversion to is failed