Chlorine and oxygen inhibition effects in the deposition of SiC-based ceramics from the SiCHCl system
D. Lespiaux, F. Langlais, R. Naslain, S. Schamm, J. SevelyVolume:
15
Year:
1995
Language:
english
Pages:
8
DOI:
10.1016/0955-2219(95)91303-6
File:
PDF, 1.04 MB
english, 1995