Phosphorus distribution in TaSi2 films by diffusion from a...

Phosphorus distribution in TaSi2 films by diffusion from a polycrystalline silicon layer

Pelleg, J., Murarka, S. P.
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Volume:
54
Year:
1983
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.332208
File:
PDF, 860 KB
english, 1983
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