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[IEEE IEEE Ultrasonics Symposium, 2004 - Montreal, Canada (23-27 Aug. 2004)] IEEE Ultrasonics Symposium, 2004 - Thin film bulk acoustic wave resonator (TFBAR) gas sensor
Benetti, M., Cannat, D., D'Amico, A., Di Pietrantonio, F., Foglietti, V., Verona, E.Volume:
3
Year:
2004
Language:
english
DOI:
10.1109/ultsym.2004.1418122
File:
PDF, 681 KB
english, 2004