Suppression mechanisms for oxidation stacking faults in...

Journal of Applied Physics 1992 Vol. 71; Iss. 4

Suppression mechanisms for oxidation stacking faults in silicon on insulator

Guillemot, N., Tsoukalas, D., Tsamis, C., Margail, J., Papon, A. M., Stoemenos, J.
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Volume:
71
Year:
1992
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.351202
File:
PDF, 1.63 MB
english, 1992
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