Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1992 / 1 Vol. 10; Iss. 1
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Preparation of transmission electron microscopy cross sections using nanofabrication techniques
Yater, J. A.Volume:
10
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.586296
Date:
January, 1992
File:
PDF, 570 KB
english, 1992