Origin and effect of impurity incorporation in...

Journal of Applied Physics 2003 Vol. 93; Iss. 11

Origin and effect of impurity incorporation in plasma-enhanced ZrO[sub 2] deposition

Cho, Byeong-Ok, Lao, Sandy X., Chang, Jane P.
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Volume:
93
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1572193
File:
PDF, 417 KB
english, 2003
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