![](/img/cover-not-exists.png)
Effect of tip shape on line edge roughness measurement based on atomic force microscopy
Li, Ning, Wang, Fei, Zhao, XuezengVolume:
81
Year:
2010
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3518973
File:
PDF, 596 KB
english, 2010