Effect of tip shape on line edge roughness measurement...

Effect of tip shape on line edge roughness measurement based on atomic force microscopy

Li, Ning, Wang, Fei, Zhao, Xuezeng
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Volume:
81
Year:
2010
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3518973
File:
PDF, 596 KB
english, 2010
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