Transmission electron microscopy analysis of ‘‘black belt:’’ The masking film of white ribbon of Kooi effect in the local oxidation of silicon process
Sheng, Tan-Tsu, Lu, Chih-Yuan, Chang, Ruey-Dar, Chiang, Song-TsanVolume:
75
Year:
1994
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.356057
File:
PDF, 831 KB
english, 1994