Effect of sputter heating in ionized metal physical vapor...

Effect of sputter heating in ionized metal physical vapor deposition reactors

Lu, Junqing, Kushner, Mark J.
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Volume:
87
Year:
2000
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.372969
File:
PDF, 422 KB
english, 2000
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