Optimization of electron probe forming systems with respect...

Journal of Vacuum Science and Technology 1979 / 11 Vol. 16; Iss. 6

Optimization of electron probe forming systems with respect to aberrations and vertical beam landing

Kern, Dieter P.
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Volume:
16
Language:
english
Journal:
Journal of Vacuum Science and Technology
DOI:
10.1116/1.570273
Date:
November, 1979
File:
PDF, 1.21 MB
english, 1979
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