Oxygen Diffusion through the Disordered Oxide Network during Silicon Oxidation
Bongiorno, Angelo, Pasquarello, AlfredoVolume:
88
Language:
english
Journal:
Physical Review Letters
DOI:
10.1103/PhysRevLett.88.125901
Date:
March, 2002
File:
PDF, 79 KB
english, 2002