Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1983 Vol. 1; Iss. 4
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Proximity effect correction on substrates of variable material composition
Vettiger, PeterVolume:
1
Year:
1983
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.582704
File:
PDF, 590 KB
english, 1983