Wideband visible wavelength range MEMS Fabry-Perot Tunable...

Wideband visible wavelength range MEMS Fabry-Perot Tunable Filter with Ag alloy mirror

Hirokubo, Nozomu, Komatsu, Hiroshi, Hashimoto, Nobuaki, Sonehara, Makoto, Sato, Toshiro
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Volume:
96
Language:
english
Journal:
Electronics and Communications in Japan
DOI:
10.1002/ecj.11451
Date:
March, 2013
File:
PDF, 1.22 MB
english, 2013
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