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Ion sources for microsize ion-beam treatment of optical parts
Michnev, R. A., Shtandel, S. K., Belokurov, A. P., Martynov, M. I.Volume:
69
Year:
1998
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1148592
File:
PDF, 313 KB
english, 1998